論文がアクセプトされました(間普先生)
Importance of Advanced Metrology in Semiconductor Industry and Value-added
Creation Using AI/ML
K. Okamoto, M. Sugiyama, S. Mabu
e-J. Surf. Sci. Nanotech., 2020, 184, 214-222.
DOI : 10.1380/ejssnt.2020.214
Abstract: In the Internet of Things (IoT) era using Big Data, metrology is recognized
as a crucial process that provides added value in hyper-scaling semiconductor
manufacturing processes. Miniaturization of semiconductors requires the
discussion of quantum theory on the order of tens of nanometers, and metrology
(measurement technology) that supports this requirement has the potential
of creating new research fields. Super-resolution optical technology is
a common measurement technique that exceeds the physical limit. Moreover,
advanced integrated metrology techniques, which include a combination of
various kinds of metrology techniques coupled with artificial intelligence
(AI) and machine learning (ML), have the potential to evolve into an untapped
technological field required by the market. We conduct extensive discussions
on the implications of AI/ML. A new way of advanced integrated metrology
can be considered as an important role for the fabrication of next generation
integrated circuit and be connected to value-added creation.